Verfahren und Vorrichtung zum Tauchfreien Beschichten einer Oberfläche eines Werkstücks

Details

Veröffentlichungs-Nr.

EP4715086

Anmeldetag

23. September 2024

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

C23C18/16(SUMITOMO BAKELITE CO et al.)(FSI INT et al.)(HOTTA TERUYUKI et al.)(TOKYO ELECTRON LTD et al.)

Abstract

An apparatus for non-immersive wet-chemical treatment of a surface of a workpiece (2) comprises: a holding device (7) for holding the workpiece (2) with the surface in a predominantly upright orientation; a liquid application system (5) for flowing liquid (6) across the surface of the workpiece (2), when held by the holding device (7), as a film flowing in a predominantly downwards direction; a receptacle (4) for collecting liquid (9) that has flowed across and detached itself from the surface; and a system (11,12,16,18-20,22,24) for recirculating liquid collected in the receptacle (4) to the liquid application system (5). The system (11,12,16,18-20,22,24) for recirculating liquid comprises a device (22,23) for introducing sparging gas (21) into the liquid.

Anmelder

Firma

Atotech Deutschland GmbH & Co. KG

Land

🇩🇪 Deutschland

Fachgebiete