Verfahren zur Messung von Schichtdickenabweichungen, Folienherstellungsverfahren, Vorrichtung zur Messung von Schichtdickenabweichungen und Folienherstellungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4715320

Anmeldetag

27. Mai 2024

Veröffentlichung

9. Januar 2025

Rechtsraum

EP

Abstract

Provided are a film thickness deviation measurement technology and a film manufacturing technology which are capable of acquiring information on a film thickness deviation of a film in a non-contact manner by a simple and safe device configuration. A film thickness deviation measurement method includes: setting a film to be measured as an object to be measured; setting a preset background image to be captured by imaging means; acquiring a reference image that is an image obtained by capturing the background image by the imaging means in a state in which the object to be measured is not interposed, or a reference image derived by calculation of an appearance of the background image by the imaging means in a state in which the object to be measured is not interposed; interposing the object to be measured between the background image and the imaging means to acquire a measurement image that is an image obtained by capturing the background image by the imaging means; and calculating an amount of displacement of the background image between two images including the acquired reference image and the acquired measurement image based on the two images to obtain a film thickness deviation of the object to be measured.

Anmelder

Firma

JFE Steel Corporation

Land

🇯🇵 Japan