Messsystem, Messvorrichtung und Messverfahren

Details

Veröffentlichungs-Nr.

EP4715327

Anmeldetag

19. Mai 2023

Veröffentlichung

28. November 2024

Rechtsraum

EP

IPC

G01C3/00, G01C15/00

Abstract

A measurement system SYS irradiates measurement light ML onto an object MT to measures a position of the object. The measurement system includes: an irradiation apparatus 13 that emits calibration light CL; a control apparatus 2 that controls the irradiation apparatus; a reflector 17 that reflects the calibration light; and a detector 14 that detects reflected light CRL from the at least one reflector, the irradiation apparatus is configured to emit the measurement light, the control apparatus is configured to control an irradiation direction of the measurement light, and the control apparatus calibrates, based on a detected result of the reflected light by the detector, control information for controlling the irradiation direction of the measurement light.

Anmelder

Firma

NIKON CORPORATION

Land

🇯🇵 Japan

Fachgebiete