Strukturanalysevorrichtung, Strukturanalyseverfahren und Strukturanalyseprogramm

Details

Veröffentlichungs-Nr.

EP4715376

Anmeldetag

22. Dezember 2023

Veröffentlichung

21. November 2024

Rechtsraum

EP

Abstract

Summary[Problem]To provide a configuration capable of further supporting measurement in electron diffraction.[Solution]According to one aspect of the present invention, a structural analysis device using electron diffraction is provided. This structural analysis device is provided with at least one processor capable of executing a program so as to perform the following steps. In a display step, an image including a plurality of samples is displayed from transmitted electronic data, wherein the transmitted electronic data is transmitted electron data obtained by irradiating a region including the plurality of samples with an electron beam. In a calculation step, transmittance of each of the plurality of samples is calculated on the basis of the transmitted electronic data. In a selection step, at least one sample satisfying a predetermined condition is selected from within the image, wherein the predetermined condition is a condition related to the transmittance.

Anmelder

Firma

Rigaku Corporation

Land

🇯🇵 Japan