Verfahren zur Herstellung einer Dreidimensionalen Elektrisch Leitfähigen Struktur

Details

Veröffentlichungs-Nr.

EP4716386

Anmeldetag

19. September 2024

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

(MURAMATSU SHIGETSUGU et al.)

Abstract

A method for manufacturing a three-dimensional electrically conductive structure (100). A substrate (S) is provided with a structure (10) comprising a set of core structures (10p), each respective core structure (10p) extending with a respective height (H) above a surface of the substrate (S). A conductive seed layer (11) is applied to the substrate (S). A mask layer (12) is applied by coating to the conductive seed layer (11). The mask material (12m) forms a mask pattern masking the conductive seed layer (11) at respective masked areas (12p) of the substrate (S). The conductive seed layer (11) is exposed at respective exposed areas (12e, 12e'). Additional electrically conductive material (13m) is grown on the conductive seed layer (11) at the respective exposed areas (12e,12e'), including the conductive seed layer (11) covering the set of core structures (10p) to form part of the three-dimensional electrically conductive structure (100).

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Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

Land

🇳🇱 Niederlande