Messmodul mit Einstellbarer Weglängendifferenz und Fokussierungseinrichtung für Laserbearbeitungsgeräte

Details

Veröffentlichungs-Nr.

EP4721909

Anmeldetag

21. Juni 2023

Veröffentlichung

8. April 2026

Rechtsraum

EP

IPC

B23K26/06

Abstract

The invention refers to a measurement module (10) for a laser processing apparatus (1) in which a first optical path (P1) and a second optical path (P2) are defined for laser light within a housing (11). The first optical path (P1) has a fixed predefined optical path length. The second optical path (P2) is defined between a connection port (12) of the housing and a coupling port (14) and has a variable optical path length adjustable by an optical path length regulator system (20). The invention further refers to an interferometer system comprising a measurement module with a first optical path (P1) corresponding to a reference arm of the interferometer system and with a second optical path (P2) corresponding to an object arm of the interferometer system, wherein an optical path length regulator system (20) is configured for adjusting an optical path length of the second optical path (P2), i.e., of the object arm of the interferometer system. The measurement module (10) further comprises a focusing device (18) arranged in the second optical path (P2) between the connection port (12) and the optical path length regulator system (20) and configured for focusing the laser light transmitted through the second optical path (P2). The invention further refers to a laser processing apparatus (1) comprising a laser processing module (30) for laser-processing a workpiece (P) on a work field (37) using a work beam (W) and a measurement module (10) according to the invention.

Anmelder

Firma

Raylase GmbH

Land

🇩🇪 Deutschland

Fachgebiete