Inspektionsvorrichtung und Inspektionsverfahren

Details

Veröffentlichungs-Nr.

EP4722745

Anmeldetag

17. Mai 2024

Veröffentlichung

5. Dezember 2024

Rechtsraum

EP

Abstract

This inspection device inspects an inspection object which has an imaging device into which light enters from a side opposite a wiring layer. The inspection device includes: a mounting platform through which light can pass that has a mounting surface on which the inspection object is to be mounted in a manner facing the opposite side of the imaging device with respect to the wiring layer; a mounting platform operating part capable of moving the mounting platform vertically and horizontally; and an irradiation device that irradiates inspection light onto the imaging device through the mounting surface. The mounting platform operating part changes, by moving the mounting platform, the relative position of the irradiation device with respect to the inspection object mounted on the mounting surface.

Anmelder

Firma

Tokyo Electron Limited

Land

🇯🇵 Japan