Flüssigkeitsentschäumungsvorrichtung und Reinigungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4729144

Anmeldetag

12. Juni 2024

Veröffentlichung

19. Dezember 2024

Rechtsraum

EP

IPC

B01D19/00, H01L21/67

Abstract

The present disclosure provides a liquid defoaming device and a cleaning apparatus, relates to the field of semiconductor processing technology, and aims to solve a problem that a large amount of foam is mixed in a liquid in a tested pipeline. The liquid defoaming device includes: a defoaming chamber, an inner wall surface of the defoaming chamber being a rotating curved surface, a radius of an inner-wall-surface lower part gradually decreasing from top to bottom, the defoaming chamber being provided with a liquid inlet and a first drain port, the liquid inlet being disposed in an upper part of the defoaming chamber, a liquid inlet direction of the liquid inlet being parallel with a tangential direction of an inner-wall-surface upper part of the defoaming chamber, and the first drain port being located in the middle of a bottom end of the inner wall surface; and a cover, the cover being disposed on the defoaming chamber and provided with a second drain port, and the second drain port being disposed opposite to a center of a top end of the defoaming chamber. The liquid defoaming device provided in the present disclosure can improve separation efficiency and reduce a foam content in the liquid.

Anmelder

Firma

Beijing NAURA Microelectronics Equipment Co., Ltd.

Land

🇨🇳 China

Fachgebiete