Computerimplementiertes Verfahren zur Zerstörungsfreien Bestimmung der Porosität einer Dünnschicht auf Basis Statischer Visueller Daten aus der Laserspeckle-Photometrie

Details

Veröffentlichungs-Nr.

EP4729927

Anmeldetag

17. Oktober 2025

Veröffentlichung

22. April 2026

Rechtsraum

EP

IPC

(WANG XINGZE et al.)

Abstract

The invention relates to a computer-implemented method for non-destructive determination of the porosity of a thin layer, which comprises the following steps: (a) acquiring static visual data of the Laser type and the LED type from a laser speckle photometry device arranged to illuminate the surface of the thin layer by a laser and an LED and to capture the reflected light field; and (b) processing the acquired data in a computing unit, wherein the processing includes a spatial synchronization of the Laser-type data and the LED-type data; a reduction of channels of the Laser-type data and the LED-type data into monochromatic single-channel data if the acquired data are in a multichannel format; a generation of three-channel data, wherein one channel comprises monochromatic Laser-type data, a second channel comprises monochromatic LED-type data, and a third channel is null; an extraction of data patterns; a normalization of data patterns; and processing of the normalized data patterns using a trained, validated and tested regression neural network, wherein the output of processing is the porosity value of the thin layer.

Anmelder

Firma

Ustav informatiky Slovenskej akademie vied verejna vyskumna institucia

Land

🇸🇰 Slowakei