Inspektionsvorrichtung

Details

Veröffentlichungs-Nr.

EP4729931

Anmeldetag

24. Juni 2024

Veröffentlichung

24. April 2025

Rechtsraum

EP

IPC

G01N21/89

Abstract

An inspection device 1 for detecting foreign matter F, which is a transparent substance, in an object S comprises: an irradiation unit 3 configured to irradiate the object S with inspection light L0 including a plurality of wavelengths; a spectroscopic detection unit 4 configured to detect light L1 from an irradiation position R of the inspection light L0 in the object S and output a spectroscopic spectrum D indicating luminance of each wavelength at the irradiation position R; and a determination unit 5 configured to determine presence or absence of the foreign matter F at the irradiation position R based on information about periodicity of the spectroscopic spectrum D.

Anmelder

Firma

Hamamatsu Photonics K.K.

Land

🇯🇵 Japan