Koordinierte Einstellung eines Objektarms und eines Referenzarms

Details

Veröffentlichungs-Nr.

EP4733712

Anmeldetag

24. Oktober 2024

Veröffentlichung

29. April 2026

Rechtsraum

EP

IPC

(SCHÖNLEBER MARTIN et al.)(SMITH DANIEL GENE et al.)

Abstract

The invention refers to a measurement module (10) for a laser processing apparatus (1) comprising a connection port (12) for coupling to a distance detection device (42) and a coupling port (14) for coupling to a laser processing module (30); a first optical path (P1) and a second optical path (P2) for laser light received and outputted through the connection port (12), wherein the first optical path (P1) is defined from the connection port (12) to a reference optical reflector (16) and the second optical path (P2) is defined between the connection port (12) and the coupling port (14); further comprising a first optical path length regulator system (20) for adjusting a first optical path length of the first optical path (P1) and a second optical path length regulator system (21) for adjusting a second optical path length of the second optical path (P2); wherein the first optical path length regulator system (20) is coupled with the second optical path length regulator system (21), such that a first optical path length variation (Δ1) of the first optical path length is coupled with a second optical path length variation (Δ2) of the second optical path length. The invention further refers to a related interferometer system comprising a distance detection device (42) and such a measurement module (10) and to a laser processing apparatus (1) comprising a laser processing module (30) for laser-processing a workpiece (P) and such a measurement module (10).

Anmelder

Firma

Raylase GmbH

Land

🇩🇪 Deutschland