Hochdirektionaler Mems-Beschleunigungsmesser

Details

Veröffentlichungs-Nr.

EP4733772

Anmeldetag

25. Oktober 2024

Veröffentlichung

29. April 2026

Rechtsraum

EP

IPC

G01P15/093, // G01P15/08(PAINTER OSKAR et al.)(DAHLEM MARCUS S et al.)

Abstract

The present invention is related to a MEMS-based accelerometer (1) comprising:- a frame (2),- a platform (3) forming an inertial mass M, and defining a platform plane XY,- at least 10, preferably at least 20, more preferably at least 50, straight-shaped tethers (4) coupling said platform (3) to said frame (2),- detection means to detect the displacement of the platform (3) with respect to the frame (2),characterized in that the tethers (4) extend in at least two different directions along said platform plane XY.

Anmelder

Firma

CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement

Land

🇨🇭 Schweiz

Fachgebiete