Rastersondenmikroskop

Details

Veröffentlichungs-Nr.

EP4733773

Anmeldetag

25. Oktober 2024

Veröffentlichung

29. April 2026

Rechtsraum

EP

IPC

G01Q10/06(MOON CHRISTOPHER RYAN et al.)(BAUR CHRISTOF et al.)

Abstract

A scanning probe microscope (10) is described, comprising a probe (1) with a cantilever (11) carrying a tip (12), the scanning probe microscope configured to generate a first actuating motion changing a distance of the tip (12) with respect to a sample surface, a detector (4) configured to detect a tip position and to output a tip position signal, a control circuit (5) configured to generate a first control signal using the tip position signal, the scanning probe microscope being configured to generate a second actuating motion adapting a distance between the probe (1) and the sample surface using the first control signal, wherein the control circuit (5) is configured to generate a second control signal, the scanning probe microscope being configured to generate, using the second control signal, a third actuating motion at least partially opposing detachment-induced oscillations of the cantilever (11) induced by detaching of the tip (12) from the sample surface while retracting the probe (1).

Anmelder

Firma

Ecole Polytechnique Fédérale de Lausanne (EPFL)

Land

🇨🇭 Schweiz

Fachgebiete