Vakuumauslasssystem und Vakuumpumpe

Details

Veröffentlichungs-Nr.

EP4737732

Anmeldetag

24. Juni 2024

Veröffentlichung

2. Januar 2025

Rechtsraum

EP

IPC

F04D19/04

Abstract

Provided is a vacuum exhaust system with which reductions in cost and size and/or an increase in the degree of freedom pertaining to piping design can be achieved.A vacuum exhaust system 10 for exhausting a process gas from a plurality of chambers 10-1 to 10-n includes a plurality of turbo molecular pumps 100-1 to 100-n, a collecting pipe 14 to which outlet ports of the plurality of turbo molecular pumps are connected in parallel, one or more dry pumps 16 connected to the collecting pipe 14, and chamber introduction valve devices 30-1 to 30-n for controlling a flow rate of a gas introduced into the plurality of chambers 10-1 to 10-n, wherein an exhaust flow rate threshold T of the process gas is set on the basis of a flow rate that can be exhausted by the plurality of turbo molecular pumps 100-1 to 100-n, and at least one of an introduction timing and the flow rate of the gas is controlled by the chamber introduction valve devices 30-1 to 30-n so as not to exceed the exhaust flow rate threshold T.

Anmelder

Firma

Edwards Japan Limited

Land

🇯🇵 Japan

Fachgebiete