Oberflächenbehandeltes Aluminiummaterial, Verfahren zur Herstellung davon und Element für Halbleiterherstellungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4741538

Anmeldetag

6. Juni 2024

Veröffentlichung

27. Februar 2025

Rechtsraum

EP

Abstract

A surface-treated aluminum material (1) comprises: a base material (2), which is composed of aluminum or an aluminum alloy in which the Cu content is 0 mass% or more and 1.8 mass% or less; and a protective film (3), which is formed on the base material. The protective film (3) comprises: an oxide layer (31), which is composed of an oxide or oxides of aluminum and covers the base material (2); and a hydrated oxide layer (32), which contains a hydrated oxide or hydrated oxides of aluminum and covers the oxide layer (31). In the situation in which cathodic polarization measurements are performed, using a prescribed measurement solution, on the base material (2) and on the surface-treated aluminum material (1) after it had been heated for 4 hours at a temperature of 200°C, the ratio J1/J2 of the current density J1 of the surface-treated aluminum material (1) to the current density J2 of the base material (2) is 150 × 10^-5 or less.

Anmelder

Firma

UACJ Corporation

Land

🇯🇵 Japan