Vorrichtung zur Schichtdickenmessung und Verfahren Hierzu

Details

Veröffentlichungs-Nr.

EP4742154

Anmeldetag

7. März 2025

Veröffentlichung

13. Mai 2026

Rechtsraum

EP

IPC

G06T7/12, G06T7/62

Abstract

A first aspect of the present disclosure is related to an imaging device for determining a thickness of a layer comprised in an image,configured to:- obtain an image of a sample with one or more layers ;- obtain from a user interface a first estimation information indicating a location of a first edge of a layer;- obtain from the user interface a second estimation information indicating a location of a second edge of the layer;- determine the first edge of the layer based on the first estimation information;- determine the second edge of the layer based on the second estimation information;- determine a distance between the first edge and the second edge.

Anmelder

Firma

Leica Microsystems CMS GmbH

Land

🇩🇪 Deutschland