3D-Modellierung von Druckflüssen in einer Verarbeitungskammer

Details

Veröffentlichungs-Nr.

EP4745548

Anmeldetag

15. November 2024

Veröffentlichung

20. Mai 2026

Rechtsraum

EP

IPC

G01L19/00, B01J3/00, G06F30/27

Abstract

The invention pertains to a computer-implemented method (100) for determining pressure in a region of interest of a processing chamber, the processing chamber comprising a support structure to support an object to be processed in the processing chamber, at least one controllable fluid inlet and at least one controllable fluid outlet, and a set of pressure sensors, the set of pressure sensors comprising a plurality of pressure sensors. The method comprises providing (115) a digital model of the processing chamber, performing a training process (120) comprising applying a defined variation of chamber pressures by varying a fluid flow in the processing chamber, and acquiring (126) a series of pressure values by means of the set of pressure sensors during the variation of chamber pressure, deriving (130), based on the digital model of the processing chamber and on the series of pressure values, a three-dimensional pressure distribution model, the pressure distribution model providing information about pressure at least in the region of interest, and performing a pressure determining process for determining a pressure of interest that is related to the region of interest, the determining process comprising measuring (150) one or more pressure values by means of a subset of the plurality of pressure sensors, and determining (160), based on the 3D pressure distribution model and the one or more pressure values, the pressure of interest.

Anmelder

Firma

VAT Holding AG

Land

🇨🇭 Schweiz

Fachgebiete