Sensoreinrichtung zur Gleichzeitigen Messung Bis zu Sechs Bewegungsfreiheitsgraden einer Prüfmasse

Details

Veröffentlichungs-Nr.

EP4745583

Anmeldetag

19. November 2024

Veröffentlichung

20. Mai 2026

Rechtsraum

EP

Abstract

Sensor device (1) for simultaneous measurement of up to six motional degrees of freedom of a test mass (2), wherein the sensor device comprises a housing frame (3), a test mass (2), wherein the test mass is moveably attached to the housing frame (3), said test mass (2) is configured to reflect impinging laser light, a laser light system (4), configured to generate a plurality of laser beams (LB) and to direct each of said laser beams (LB) to the test mass (2), a detector system (5), comprising a plurality of position-sensitive detectors (PSD), wherein each detector (PSD) is configured to detect laser light reflected from the test mass (2), a processor, configured to receive signals created by the plurality of detectors (PSD) and to determine the position and orientation of the test mass (2) relative to the housing frame (3), wherein the housing frame (3) comprises suspension elements (6), by means of which the test mass (2) is suspended from mounting sites (7) of the housing frame (3) during a measurement of the up to six motional degrees of freedom the test mass (2).

Anmelder

Firmen

Österreichische Akademie der Wissenschaften
Universität Wien

Land

🇦🇹 Österreich