Resonanter Drucksensor

Details

Veröffentlichungs-Nr.

EP4746291

Anmeldetag

6. Januar 2021

Veröffentlichung

20. Mai 2026

Rechtsraum

EP

IPC

G01L9/00, B81B3/00, H03H9/24H03H9/24(HERB WILLIAM R et al.)

Abstract

A resonant pressure sensor (1A; 1B) includes: a housing (50); a housing-fixed portion (2) fixed to the housing; a substrate (3; 3A; 3B; 3C) including a substrate-fixed portion (31) fixed to the housing-fixed portion (2) and a substrate-separated portion (32; 32A; 32B; 32C)) separated from the housing-fixed portion (2) in a first direction and extending from the substrate-fixed portion (31); a gap (S) being defined between the housing-fixed portion (2) and the substrate (3; 3A; 3B; 3C), the gap (S) being configured to receive a pressure-receiving fluid (F; K) enveloping the substrate; a first resonator (4) disposed in the substrate-separated portion (32; 32A; 32B; 32C) and configured to detect a change of a resonance frequency based on a strain in the substrate (3; 3A; 3B; 3C) caused by static pressure applied by a pressure-receiving fluid (F; K); a first electrode (36a) extending along a second direction perpendicular to the first direction and configured to output an excitation signal to the first resonator (4) to excite the first resonator (4); a second electrode (36c) extending along the second direction and from which the first resonator (4) is configured to output a signal having the resonance frequency; and a processor configured to measure the static pressure based on the detected change of the resonance frequency. The first resonator (4) is disposed between the first electrode (36a) and the second electrode (36c) in a third direction perpendicular to the first direction and the second direction.

Anmelder

Firma

Yokogawa Electric Corporation

Land

🇯🇵 Japan

Fachgebiete