Flüssigkeitsausstosskopf, Flüssigkeitsausstossvorrichtung und Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes

Details

Veröffentlichungs-Nr.

EP4748575

Anmeldetag

25. November 2025

Veröffentlichung

27. Mai 2026

Rechtsraum

EP

IPC

B41J2/14, B41J2/16

Abstract

A liquid ejecting head includes a pressure chamber substrate having a plurality of pressure chambers arranged in a first direction, a diaphragm disposed on the pressure chamber substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a seed layer located between the piezoelectric layer and the diaphragm for controlling orientation of the piezoelectric layer. The piezoelectric layer includes a first region not overlapping the first electrode in the first direction, and a second region overlapping the first electrode in the first direction. The seed layer includes a first seed layer disposed not in the first region but in the second region, and a second seed layer provided on the first seed layer and disposed over both the first region and the second region.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan