Vorrichtung zur Herstellung eines Oxideinkristalls, Verfahren zur Herstellung von Galliumoxideinkristallen unter Verwendung der Vorrichtung und damit Hergestellter Galliumoxideinkristall

Details

Veröffentlichungs-Nr.

EP4748979

Anmeldetag

16. April 2025

Veröffentlichung

27. Mai 2026

Rechtsraum

EP

Abstract

The present disclosure relates to an apparatus for producing an oxide single crystal, a method of producing a gallium oxide single crystal using the same, and a gallium oxide single crystal produced thereby. More specifically, the present disclosure relates to an apparatus for producing a single crystal and a method for producing a gallium oxide single crystal using the same, which may minimize the problem of impurities being introduced by a crucible, by applying a method of using the oxide pellets themselves, which are to be made into a single crystal, as a crucible without using a separate crucible, and maintain the growth atmosphere of the oxide single crystal at a high-oxygen atmosphere by applying a method of generating heat using a flame consisting of a mixture of a hydrocarbon fuel gas and oxygen gas, thereby producing a high-quality oxide single crystal with few defects.

Anmelder

Firma

Pusan National University Industry-University Cooperation Foundation

Land

🇰🇷 Südkorea