Chemisch Verstärkte Negative Resistzusammensetzung und Verfahren zur Bildung einer Resiststruktur

Details

Veröffentlichungs-Nr.

EP4749365

Anmeldetag

21. November 2025

Veröffentlichung

27. Mai 2026

Rechtsraum

EP

IPC

G03F7/004, G03F7/038

Abstract

An onium salt in which an aromatic ring having a sulfo group bonded thereto and another aromatic ring structure containing a bulky substituent group are linked via a sulfonamide bond generates an aromatic sulfonic acid with adequate acidity and controlled diffusion. When a chemically amplified negative resist composition comprising the onium salt as an acid generator and a polymer is processed by lithography, a pattern with improved resolution, reduced LER and satisfactory fidelity is obtainable.

Anmelder

Firma

Shin-Etsu Chemical Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete