Dampfphasen-Wachstumsvorrichtung
Anmelder: Nippon Sanso Corporation, Taiyo Nippon Sanso Corporation 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4749683
- Anmeldetag
- 11. Juni 2024
- Veröffentlichung
- 23. Januar 2025
- Rechtsraum
- EP
- IPC
- H01L21/205, C23C16/44
Abstract
The present invention has an object to provide a vapor phase growth apparatus which can automatically transfer a member to an MOCVD reactor and a dry-cleaning apparatus. The present invention provides a vapor phase growth apparatus (1) including: a reaction chamber (10) storing an MOCVD reactor (16) for growing crystals on wafers (W) held in a reactor member (25); a first transfer chamber (45) which is configured to store a first transfer unit for transferring the reactor member and the wafers, the first transfer chamber being disposed adjacent to the reaction chamber and capable of communicating with the reaction chamber; and a cleaning chamber (65) storing a dry-cleaning apparatus (66) for cleaning the reactor member, the cleaning chamber being disposed adjacent to the first transfer chamber and capable of communicating with the first transfer chamber.
Anmelder
- Firmen
- Nippon Sanso Corporation
Taiyo Nippon Sanso Corporation - Land
- 🇯🇵 Japan
Taiyo Nippon Sanso ist ein japanischer Hersteller von Industriegasen und zugehörigen Anlagen, Teil der Mitsubishi-Chemical-Gruppe. Der Patentbestand konzentriert sich auf Verfahrens- und Trenntechnik sowie Wärme-, Fertigungs- und Werkstofftechnik.
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