Verfahren zur Herstellung eines Diamantsubstrats

Details

Veröffentlichungs-Nr.

EP4752269

Anmeldetag

19. Juli 2024

Veröffentlichung

30. Januar 2025

Rechtsraum

EP

Abstract

A new diamond substrate having a {100} plane as a main surface is created from a single crystal diamond having a {100} plane as a main surface. The method includes a step of performing prior processing on a first starting point 42A and a second starting point 42b respectively set on a first crystal face 11a and a second crystal face 11b from among crystal faces constituting a {111} plane, by condensing the laser light using the laser condenser, the first crystal face 11a and the second crystal face 11b forming a wedge structure whose tip becomes thinner toward the main surface 10a inside a single crystal diamond block 10; and a step of forming a scanning line unit 14 by condensing the laser light using the laser condenser 190, and forming a first scanning line 41a and a second scanning line 41b on the first crystal face 11a and the second crystal face 11b, respectively, using processing marks from the first starting point 42a and the second starting point 42b toward the main surface 10a, the first scanning line 41a and the second scanning line 41b being connected at the tip of the wedge structure 12.

Anmelder

Firmen

Shin-Etsu Polymer Co., Ltd.
SHIN-ETSU CHEMICAL CO., LTD.
National University Corporation Saitama University

Land

🇯🇵 Japan