Vorrichtung, System und Verfahren zur Interferometrischen Detektion

Details

Veröffentlichungs-Nr.

EP4752497

Anmeldetag

29. November 2024

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

Abstract

A device (100; 200) for interferometry detection comprises: a receiving unit (114; 214) configured to receive a reference beam and a response beam, based on a sample interacting with the sample beam to form the response beam carrying information of the sample; at least a first waveguide system (120; 220) configured to receive the reference beam and configured to transport the reference beam along different path lengths to a plurality of first outputs (126; 226); a plurality of light sensors (130; 230) configured to receive a combination of the reference beam and the response beam forming an interference of the reference beam and the response beam, wherein the plurality of light sensors (130; 230) are configured to simultaneously detect interference of the reference beam and the response beam corresponding to different path length relations between the reference beam and the response beam.

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien