Vorrichtung und Verfahren zur Plasmaatmosphärenkontrolle

Details

Veröffentlichungs-Nr.

EP4753375

Anmeldetag

1. Dezember 2025

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

IPC

H05H1/24, B23K3/08

Abstract

The present application discloses a device and method for atmosphere control using plasma, intended for removing contaminants within an at least partially enclosed chamber (100), method whereby a reactive gas is delivered to a plasma generation system, the generated plasma being introduced into the at least partially enclosed chamber (100) so that the plasma diffuses and reacts with the contaminants in the chamber (100) until the contaminant concentration is reduced to below a predetermined value, the technical solution being particularly suitable for applications where the atmosphere in the partially enclosed chamber (100) needs to be quickly switched and rapidly reduced to extremely low oxygen levels.

Anmelder

Firma

L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude

Land

🇫🇷 Frankreich

Fachgebiete