Beschichtungsvorrichtung und Verfahren zur Herstellung eines Substrats mit Beschichtungsfilm

Details

Veröffentlichungs-Nr.

EP4755522

Anmeldetag

6. August 2024

Veröffentlichung

13. März 2025

Rechtsraum

EP

Abstract

A coating device of the present invention includes a coating fluid discharge nozzle including a plurality of coating fluid discharge ports arranged in a width direction of a substrate being conveyed, and at least two or more gas discharge nozzles for blowing gas to a plurality of columnar coating fluids discharged from the coating fluid discharge ports. These two gas discharge nozzles are provided with gas discharge ports between which a row of the coating fluid discharge ports is interposed as observed from a discharge direction of the coating fluid, the gas discharge ports being provided so as to be positioned at a location away from a virtual plane toward the substrate, the virtual plane passing through the coating fluid discharge ports and orthogonal to the discharge direction of the coating fluid, an axis extending in a discharge direction of the gas from each gas discharge port forming an angle of less than 90° with an axis extending in the discharge direction of the coating fluid from each coating fluid discharge port as observed from the width direction of the substrate.

Anmelder

Firma

Toray Industries, Inc.

Land

🇯🇵 Japan