Elektrische Sicherung mit einer Sicherungsverbindung Entlang Seitenwänden einer Inaktiven Gate-Struktur

Details

Veröffentlichungs-Nr.

EP4756875

Anmeldetag

4. Juni 2025

Veröffentlichung

10. Juni 2026

Rechtsraum

EP

IPC

H01L23/525, H10D84/08

Abstract

An electronic fuse includes an inactive gate structure over a substrate, and a fuse link along at least one sidewall of the inactive gate structure. A first terminal is at a first end of the fuse link, and a second terminal is at a second of the fuse link. The fuse link takes the form of a conductive metal spacer along at least one sidewall of the inactive gate structure and can be formed without a silicide process. Although the e-fuse can be used with any semiconductor device, it is advantageous for use with, for example, III-IV semiconductor devices. The method of making the e-fuse does not require any additional masks and provides a fuse link having a sub-photolithographic width dimension.

Anmelder

Firma

GlobalFoundries U.S. Inc.

Land

🇺🇸 USA