Vorrichtung und Verfahren für Hochauflösende Raman-Spektroskopie

Details

Veröffentlichungs-Nr.

EP4764459

Anmeldetag

19. Dezember 2024

Veröffentlichung

24. Juni 2026

Rechtsraum

EP

IPC

G01N21/65, G01J3/44

Abstract

There is provided an apparatus for Raman spectroscopy comprising: a tunable laser configured to output laser light towards a sample for inducing Raman scattered light from the sample, wherein a wavelength of the laser light is tunable; a light collecting and filtering arrangement configured to collect the Raman scattered light in a collection angle from the sample, wherein the arrangement provides the Raman scattered light as incident light onto a narrow bandpass filter comprising a transmission band with a FWHM of 0.2 nm, and preferably 0.02 nm or less, and wherein an angle of incidence of the incident light is matched to a filter acceptance angle of the bandpass filter; and a light detector, configured to receive the Raman scattered light filtered by the arrangement and to detect the Raman scattered light. The apparatus is configured to scan the wavelength of the laser light and to detect the intensity of the Raman scattered light by the light detector for forming a Raman spectrum of the sample.

Anmelder

Firma

Stichting IMEC Nederland

Land

🇳🇱 Niederlande

Fachgebiete