Verfahren zur Herstellung eines Mikroelektrischen/mechanischen Systems mit einer Balkenstruktur

Details

Veröffentlichungs-Nr.

EP4768427

Anmeldetag

19. November 2025

Veröffentlichung

1. Juli 2026

Rechtsraum

EP

IPC

B81C1/00

Abstract

The present invention relates to a method for manufacturing a micro-electrical-mechanical system (MEMS) with a beam structure, comprising the following steps: providing a substrate (1); depositing a sacrificial layer (2) of silicon dioxide or silicon nitride on the substrate (1); cutting or etching a part in the sacrificial layer (2) to support the beam structure using laser-assisted machining, wet etching or dry etching, whereby the sacrificial layer (2) is removed down to the substrate (1); depositing a diamond layer on the sacrificial layer (2) with the cutout part to support the beam structure, whereby the diamond layer (4) is deposited to a height at which the diamond layer on the sacrificial layer and the part to support the beam structure are connected; removing at least a part of the diamond layer (4) deposited on the sacrificial layer by direct laser removal through the entire thickness of the diamond down to the sacrificial layer (2); and removing the sacrificial layer (2). This method allows for the creation of a highly precise and durable beam structure using advanced materials and technologies, while ensuring high quality and long life of the resulting MEMS components.

Anmelder

Firma

Fyzikální ústav AV CR, v. v. i.

Land

🇨🇿 Tschechien