Vakuumpumpe

Details

Veröffentlichungs-Nr.

EP4768732

Anmeldetag

21. August 2024

Veröffentlichung

27. Februar 2025

Rechtsraum

EP

IPC

F04D19/04

Abstract

A vacuum pump is proposed that has favorable back pressure performance even in a case where an intake gas is a hydrogen gas or the like. A vacuum pump 100 includes an exhaust portion 114 constituted of a turbine pump portion 115 that includes a plurality of stages of rotor blades 102 and a plurality of stages of stator blades 123, and a drag pump portion 116 that is located on a further toward exhaust downstream side than the turbine pump portion 115, exhausts from an outlet port 133 through a gas flow passage FP1 an intake gas sucked from an inlet port 101 by the exhaust portion 114, and includes an introduction flow passage FP3 through which an intermediate introduction gas having viscosity higher than that of the intake gas is introduced, and the introduction flow passage FP3 is connected to the gas flow passage FP1 on the further toward exhaust downstream side than the rotor blade 102, from among the plurality of stages of the rotor blades 102, that is closest to the inlet port 101 in the exhaust portion 114.

Anmelder

Firma

Edwards Japan Limited

Land

🇯🇵 Japan

Fachgebiete