Mems-Vorrichtung mit Verteilten Programmierbaren Elementen

Details

Veröffentlichungs-Nr.

EP4769411

Anmeldetag

1. Dezember 2025

Veröffentlichung

1. Juli 2026

Rechtsraum

EP

Abstract

Microelectromechanical systems (MEMS) and related devices and fabrication methods are provided for programmable memory devices configurable to support multiply-accumulate (MAC) operations. An exemplary microelectromechanical device includes readout electrodes, an intermediate electrode disposed on a deflectable structure of semiconductor material, a first set of individually programmable elements on a first portion of the deflectable structure to influence deflection of the first portion to influence a first variable capacitance between a first readout electrode and the intermediate electrode based on a programmed state of the programmable elements, and a second set of individually programmable elements on a second portion of the deflectable structure to influence deflection of the second portion to influence a second variable capacitance between a second readout electrode and the intermediate electrode based on a programmed state of the programmable elements.

Anmelder

Firma

HONEYWELL INTERNATIONAL INC.

Land

🇺🇸 USA