Substratverarbeitungsvorrichtung und Förderverfahren

Details

Veröffentlichungs-Nr.

EP4769486

Anmeldetag

8. August 2024

Veröffentlichung

27. Februar 2025

Rechtsraum

EP

Abstract

A substrate processing apparatus that performs processing on a substrate which is accommodated in a cassette and is to be transferred, includes: at least one transfer block configured to transfer the substrate in an interior of the at least one transfer block; a substrate processing module configured to perform the processing on the substrate; and a cassette transfer mechanism configured to transfer the cassette between a delivery position set on an outer surface of the substrate processing apparatus and a loading/unloading position at which the cassette is loaded into and unloaded from an interior of the substrate processing apparatus. The cassette transfer mechanism includes a stage on which the cassette is placed, and a moving mechanism configured to move the cassette placed on the stage.

Anmelder

Firma

Tokyo Electron Limited

Land

🇯🇵 Japan