Rohmaterial zur Bildung einer Dünnschicht, Dünnschicht, Verfahren zur Herstellung einer Dünnschicht und Lanthanverbindung

Details

Veröffentlichungs-Nr.

EP4775711

Anmeldetag

21. August 2024

Veröffentlichung

13. März 2025

Rechtsraum

EP

IPC

C23C16/18, C07F5/00

Abstract

Provided is a thin-film forming raw material including a lanthanum compound represented by the following general formula (1): <img class="EMIRef" id="07459402-b51a-40f8-abea-e218ec3777b2-ia01" /> in the general formula (1), R<1>, R<3>, R<4>, R<6>, R<7>, and R<9> each independently represent an aliphatic hydrocarbon group having 1 or more and 8 or less carbon atoms, or a heteroatom-containing hydrocarbon group having 1 or more and 8 or less carbon atoms, and R<2>, R<5>, and R<8> each independently represent a hydrogen atom, or an alkyl group having 1 or more and 3 or less carbon atoms, provided that a lanthanum compound in which R<1> and R<3>, R<4> and R<6>, and R<7> and R<9> represent entirely mutually identical groups, and all of R<2>, R<5>, and R<8> represent the same group is excluded.

Anmelder

Firma

ADEKA CORPORATION

Land

🇯🇵 Japan

Fachgebiete