Lichtwellenfrontmessvorrichtung und Lichtwellenfrontkorrekturvorrichtung
Anmelder: SCREEN Holdings Co., Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4775941
- Anmeldetag
- 11. Dezember 2025
- Veröffentlichung
- 15. Juli 2026
- Rechtsraum
- EP
Abstract
A light wavefront measurement device includes a lens array, a light receiving sensor, and a wavefront shape calculation part. The lens array focuses measurement light for each region of the wavefront of the measurement light. The light receiving sensor receives multiple light spots focused by the lens array to output an electrical signal for pixels where the amount of received light has changed. The electrical signal indicates the direction of increase or decrease in the amount of received light and the time at which the amount of received light has changed. The wavefront shape calculation part calculates the wavefront shape of the measurement light, based on the electrical signal outputted from the light receiving sensor. The amount of information outputted from the light receiving sensor is smaller than that outputted for all pixels. The light receiving sensor is hence capable of outputting information about the displacement of the light spots with high time resolution. This allows the measurement of the wavefront shape of the measurement light with high time resolution, based on the information outputted from the light receiving sensor.
Anmelder
- Firma
- SCREEN Holdings Co., Ltd.
- Land
- 🇯🇵 Japan
Japanischer Technologiekonzern. SCREEN Holdings stellt Fertigungsanlagen für die Halbleiterindustrie her, insbesondere Wafer-Reinigungs- und Beschichtungssysteme, sowie Druck- und Bildverarbeitungstechnik.
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