Optische Vorrichtung zur Inspektion, Defektinspektionsvorrichtung, Optisches Bestrahlungssystem und Inspektionsverfahren

Details

Veröffentlichungs-Nr.

EP4775952

Anmeldetag

6. September 2023

Veröffentlichung

13. März 2025

Rechtsraum

EP

Abstract

A numerical aperture setting member (39) of a first irradiation optical system (30) sets an illumination numerical aperture of first irradiation light (La) when a distance in a Z direction (an optical axis direction of the first irradiation optical system (30)) between a substrate (WF1) and a light collection position of the first irradiation light (La) is a second distance longer than a first distance to be smaller than an illumination numerical aperture of the first irradiation light (La) when the distance in the Z direction between the substrate (WF1) and the light collection position of the first irradiation light (La) is the first distance.

Anmelder

Firma

NIKON CORPORATION

Land

🇯🇵 Japan