Positioniervorrichtung zum Positionieren eines Ersten Substrats Relativ zu einem Zweiten Substrat

Details

Veröffentlichungs-Nr.

EP4776827

Anmeldetag

2. Dezember 2025

Veröffentlichung

15. Juli 2026

Rechtsraum

EP

IPC

H10P72/00, H10P72/50

Abstract

A positioning device (10) for positioning a first substrate (14) relative to a second substrate (18) is described. The positioning device (10) comprises a first substrate holder (12) for holding the first substrate (14); a second substrate holder (16) for holding the second substrate (18), wherein the first substrate holder (12) and the second substrate holder (16) are mounted such that a distance between them is adjustable; and a distance-control element (20) which can be inserted between the first substrate holder (12) and the second substrate holder (16), wherein the distance-control element (20) comprises a body (22) with a fluid inlet (24), a first substrate fluid outlet (26) which is connected to the fluid inlet (24) and which is directed towards the first substrate holder (12) and configured to eject pressurized fluid from the body (22) in the direction of the first substrate (14) when the first substrate (14) is located in the first substrate holder (12), and with a second substrate fluid outlet (28) which is connected to the fluid inlet (24) and which is directed towards the second substrate holder (16) and configured to eject pressurized fluid from the body (22) in the direction of the second substrate (18) when the second substrate (18) is located in the second substrate holder (16).

Anmelder

Firma

SUSS MicroTec Solutions GmbH & Co. KG

Land

🇩🇪 Deutschland

Fachgebiete