Verfahren zur Plasmabearbeitung eines Werkstücks

Details

Veröffentlichungs-Nr.

EP4776829

Anmeldetag

21. November 2025

Veröffentlichung

15. Juli 2026

Rechtsraum

EP

IPC

H10P72/70

Abstract

According to the invention there is provided a method of plasma processing a workpiece that is susceptible to arcing comprising the steps of:providing a workpiece having an upper portion comprising at least one insulating layer and a lower surface opposite the upper portion;applying a conductive layer to the lower surface;positioning the workpiece on a workpiece support of a plasma processing apparatus with the lower surface of the workpiece closest to the workpiece support;plasma processing the workpiece in the plasma processing apparatus, wherein the plasma processing comprises applying a RF electrical signal with an associated RF power to the workpiece support; andremoving the conductive layer from the plasma processed workpiece.

Anmelder

Firma

SPTS Technologies Limited

Land

🇬🇧 Großbritannien

Fachgebiete