Verdampfer

Details

Veröffentlichungs-Nr.

EP4779053

Anmeldetag

10. Oktober 2024

Veröffentlichung

16. April 2026

Rechtsraum

EP

Abstract

A vaporizer 10 includes a vaporizer body 20, spheres 30, and a heater H. The vaporizer body 20 includes a liquid material supply unit 12 that supplies a liquid material LM, a vaporization unit 22 having therein a vaporization space K for vaporizing the liquid material LM, and a source gas discharge unit 40 that feeds a source gas VG obtained through vaporization to a subsequent step. The spheres 30 are loaded in the vaporization unit 22. The heater H emits infrared radiation. The heater H is disposed with a gap d1 from the vaporization unit 22. The vaporization unit 22 and the spheres 30 are formed of infrared-transmissive transparent members. A liquid pool E into which the liquid material LM flows is provided in the vaporization unit 22 so as to be positioned lower than flow paths R of the liquid material LM flowing through the vaporization space K.

Anmelder

Firma

Lintec Co., Ltd.

Land

🇯🇵 Japan