Höhenmessvorrichtung, Belichtungsvorrichtung und Artikelherstellungsverfahren

Details

Veröffentlichungs-Nr.

EP4779260

Anmeldetag

22. Dezember 2025

Veröffentlichung

22. Juli 2026

Rechtsraum

EP

IPC

G01B11/06, G03F9/00

Abstract

A height measurement device includes an optical measurement device configured to measure a height of a substrate, an air sensor configured to measure a height of the substrate while discharging air through a pipeline based on a pressure in the pipeline, a member having a reference surface, and a controller configured to correct a result obtained by measuring a height at a second measurement location on the substrate using the optical measurement device based on a first result obtained by measuring a height at a first measurement location on the substrate and a height of the reference surface using the optical measurement device and a second result obtained by measuring a height at the first measurement location on the substrate and a height of the reference surface using the air sensor.

Anmelder

Firma

Canon Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete