Verfahren zum Erhalt eines Vorhersagemodells, Belichtungsvorrichtung, Belichtungsverfahren, Informationsverarbeitungsvorrichtung, Artikelherstellungsverfahren und Programm

Details

Veröffentlichungs-Nr.

EP4779404

Anmeldetag

16. Januar 2026

Veröffentlichung

22. Juli 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

A method of obtaining a prediction model for predicting fluctuation of imaging characteristics of a projection optical system which is used in an exposure apparatus that exposes a substrate via an original, the method including setting a first value, which is a value of a first coefficient in a first prediction model that is set based on a result of measuring fluctuation of imaging characteristics of a first projection optical system in a first exposure apparatus including the first projection optical system, as a value of the first coefficient in a second prediction model for predicting fluctuation of imaging characteristics of a second projection optical system in a second exposure apparatus including the second projection optical system, while temporarily setting a value of a second coefficient in the second prediction model to a default value.

Anmelder

Firma

CANON KABUSHIKI KAISHA

Land

🇯🇵 Japan

Fachgebiete