Temperatursteuerungsvorrichtung, Temperatursteuerungsverfahren, Temperatursteuerungsprogramm und Waferherstellungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4783811

Anmeldetag

22. Januar 2026

Veröffentlichung

29. Juli 2026

Rechtsraum

EP

IPC

H10P72/00

Abstract

A temperature control apparatus (1) comprising: a chamber (11) for housing an object to be measured; heating units (25, 26, 27, 28); a chamber window unit (18) positioned opposite the object to be measured; a central temperature measurement unit (21) for measuring a temperature of a central portion (14c) of the object to be measured; a peripheral temperature measurement unit (22) for measuring a temperature of a peripheral portion (14e) of the object to be measured; an identification unit (30) provided in the peripheral temperature measurement unit (22) for identifying a position of the peripheral portion (14e) of the object to be measured; an adjustment unit (110) that adjusts a measurement direction of the peripheral temperature measurement unit (22), a calculation unit (120) that calculates the central temperature and peripheral temperature, and an output control unit (130) that controls outputs of the plurality of heating units (25, 26, 27, 28) based on both the central temperature and peripheral temperature is provided.

Anmelder

Firma

Epicrew Corporation

Land

🇯🇵 Japan

Fachgebiete