Lagersystem zur Lagerung mehrerer Substratträger

Details

Veröffentlichungs-Nr.

EP4783812

Anmeldetag

19. Januar 2026

Veröffentlichung

29. Juli 2026

Rechtsraum

EP

IPC

H10P72/10

Abstract

The present disclosure relates to a storage system (100) suitable for storing a plurality of substrate holders (130), where the storage system includes a pin (308) extending along a rotation axis, at least two shelves (110) positioned along a direction substantially parallel to the rotation axis, each shelf being adapted to support at least one removable housing (120). The shelves are pivotally connected to the pin around the rotation axis and are configured to rotate around said rotation axis independently from each other. Each removable housing is adapted to support at least one substrate holder suitable for supporting a substrate (616) for the deposition of semiconductor films, said removable housing being configured to be releasably coupled to a shelf and be withdrawn therefrom. The present disclosure also relates to a substrate handling platform (602) comprising said storage system (100) and a reactor assembly (600) comprising said substrate handling platform (602).

Anmelder

Firma

L.P.E. S.p.A.

Land

🇮🇹 Italien

Fachgebiete