Waferträger
EP4783813
29. Juli 2026
Anmelder: ASM IP Holding B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4783813
- Anmeldetag
- 23. Januar 2026
- Veröffentlichung
- 29. Juli 2026
- Rechtsraum
- EP
- IPC
- H10P72/10
Abstract
A wafer boat is disclosed. The wafer boat comprises two side rods and at least one back rod, the rods extending substantially vertically between a top member and a bottom member. The rods comprise vertically spaced apart support formed at corresponding heights, each support extending away from the respective boat rods towards a central axis of the wafer boat. Each support has a wafer support surface for contacting a wafer, the wafer support surface being a polished surface, and each wafer support surface is terminated by two rounded corners.
Anmelder
- Firma
- ASM IP Holding B.V.
- Land
- 🇳🇱 Niederlande