Sensor für Physikalische Grössen

Details

Veröffentlichungs-Nr.

EP4786988

Anmeldetag

27. Januar 2026

Veröffentlichung

5. August 2026

Rechtsraum

EP

Abstract

A physical quantity sensor includes a package; a spacer; and a physical quantity sensor unit that is fixed to the package via the spacer, in which when a direction in which the spacer and the physical quantity sensor unit overlap is set as a first direction and a direction orthogonal to the first direction is set as a second direction, the physical quantity sensor unit includes a support substrate provided with a first anchor and a second anchor that are disposed to be separated in the second direction, a first movable portion fixed to the first anchor, and a second movable portion fixed to the second anchor, the spacer overlaps the first anchor and the second anchor in a plan view from the first direction, and when a width of the physical quantity sensor unit in the second direction is set as Wx1 and a width of the spacer in the second direction is set as Wx2, a relationship of 58% ≤ Wx2/Wx1 ≤ 88% is satisfied.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan