Sekundärelektronendetektor mit einer Leitfähigen Ultradünnen Membran in einem Atmosphärendruck-Elektronenmikroskop
EP4787419
5. August 2026
Anmelder: Coxem Co., Ltd. 🇰🇷
Details
- Veröffentlichungs-Nr.
- EP4787419
- Anmeldetag
- 5. Mai 2025
- Veröffentlichung
- 5. August 2026
- Rechtsraum
- EP
- IPC
- H01J37/244, H01J37/26
Abstract
The present invention relates to a secondary electron detector 100 in an atmospheric pressure electron microscope, wherein secondary electrons generated by irradiating a sample S with a high-energy electron beam are captured in an ultra-thin membrane 110 of e.g. graphene supported on an apertured 121 second thin membrane 120, and ionization of air or injection gas between the ultra-thin graphene membrane and the sample is generated by a voltage applied between the ultra-thin graphene membrane and the sample, and is greatly amplified by the avalanche effect, an ion current is displayed as an image on a monitor through an amplifier.
Anmelder
- Firma
- Coxem Co., Ltd.
- Land
- 🇰🇷 Südkorea