Zerschneideverfahren

EP4791174 12. August 2026

Anmelder: ASMPT Singapore Pte. Ltd. 🇸🇬

Details

Veröffentlichungs-Nr.
EP4791174
Anmeldetag
5. Januar 2026
Veröffentlichung
12. August 2026
Rechtsraum
EP
Offizieller Volltext

Abstract

A method for breaking a substantially planar workpiece having first and second major surfaces, with a metallization layer on the first major surface, comprises the steps of: i) forming a groove in the workpiece extending parallel to the plane, the groove being open at an upper surface of the workpiece, and then subsequently ii) applying a workpiece breaking force to the first major surface of the workpiece to crack the workpiece along a break line coincident with the groove, then iii) applying a metallization breaking force to the second major surface of the workpiece to break the metallization layer along the break line.

Anmelder

Firma
ASMPT Singapore Pte. Ltd.
Land
🇸🇬 Singapur

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