Zerschneideverfahren
Anmelder: ASMPT Singapore Pte. Ltd. 🇸🇬
Details
- Veröffentlichungs-Nr.
- EP4791174
- Anmeldetag
- 5. Januar 2026
- Veröffentlichung
- 12. August 2026
- Rechtsraum
- EP
Abstract
A method for breaking a substantially planar workpiece having first and second major surfaces, with a metallization layer on the first major surface, comprises the steps of: i) forming a groove in the workpiece extending parallel to the plane, the groove being open at an upper surface of the workpiece, and then subsequently ii) applying a workpiece breaking force to the first major surface of the workpiece to crack the workpiece along a break line coincident with the groove, then iii) applying a metallization breaking force to the second major surface of the workpiece to break the metallization layer along the break line.
Anmelder
- Firma
- ASMPT Singapore Pte. Ltd.
- Land
- 🇸🇬 Singapur