Magnetischer Z-Aktuator und Waferhalter mit einem Solchen Aktuator

Details

Veröffentlichungs-Nr.

EP4794181

Anmeldetag

12. Februar 2025

Veröffentlichung

19. August 2026

Rechtsraum

EP

IPC

H02K33/02, H02K41/02

Abstract

The invention relates to a magnetic Z-actuator (10) for payload positioning, with gravity compensation, comprising a stationary assembly (20) and a mobile assembly (40) configured to move relative to the stationary assembly (20). The stationary assembly (20) comprises a tubular magnetic yoke (21) and at least one upper permanent magnet (24a, 24b; 24) and at least one lower permanent magnet (25a, 25b; 25) mounted against an inner wall of said magnetic yoke (21) on top of each other. Each of the at least one upper and lower permanent magnets is either annular in shape, extending along the entire inner circumference of the magnetic yoke (21), or arcuate in shape, extending along a portion of the inner circumference. The at least one upper permanent magnet (24a, 24b; 24) has a radial magnetization opposite to that of the at least one lower permanent magnet (25a, 25b; 25). The mobile assembly (40) comprises a magnetic yoke (42), at least one permanent magnet (46a, 46b; 46), which is either annular in shape and positioned around the magnetic yoke (21) or arcuate in shape, covering a portion of the yoke's circumference, and at least one coil (44a, 44b; 44) mounted around said magnetic yoke (21). The stationary and mobile assemblies (20, 40) are configured to hold the payload in a stable position by counteracting gravity. The at least one coil (44a, 44b) is arranged to be energized such that the mobile assembly (40) is moved upwardly or downwardly relative to the stationary assembly (40). The present invention also concerns a wafer holder comprising the magnetic Z-actuator as well as a semiconductor equipment comprising such wafer holder.

Anmelder

Firma

ETEL S.A.

Land

🇨🇭 Schweiz

Fachgebiete