Piezoelektrisches Element, Flüssigkeitsausstosskopf und Flüssigkeitsausstossvorrichtung

Details

Veröffentlichungs-Nr.

EP4794505

Anmeldetag

5. Februar 2026

Veröffentlichung

19. August 2026

Rechtsraum

EP

Abstract

A piezoelectric element includes: a lower electrode; a piezoelectric layer having a perovskite structure that includes K and Na in an A-site and includes Nb in a B-site; an upper electrode; and a seed layer having a perovskite structure that includes a first element in an A-site and includes a second element in a B-site and configured to control an orientation of the piezoelectric layer, in which the lower electrode, the seed layer, the piezoelectric layer, and the upper electrode are arranged in this order along a lamination direction, in the piezoelectric layer, the first element and the second element decrease with gradients from bottom to top along the lamination direction, and a degree of the gradient of the first element in the piezoelectric layer is smaller than a degree of the gradient of the second element in the piezoelectric layer.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan