Zieldetektionsvorrichtung mit Verbesserter Detektionsempfindlichkeit

Details

Veröffentlichungs-Nr.

EP4796918

Anmeldetag

12. Januar 2026

Veröffentlichung

26. August 2026

Rechtsraum

EP

IPC

G01N21/64

Abstract

Disclosed is a target detection apparatus with improved detection sensitivity. The target detection apparatus includes a light source configured to emit excitation light for exciting the target; a first filter disposed behind the light source in a direction in which the excitation light is emitted from the light source; a detector configured to detect whether detection light emitted from the target is incident thereon; a dichroic mirror configured to direct incident excitation light toward the stage and direct incident detection light toward the detector; a second filter disposed behind the dichroic mirror on a traveling path of the detection light, the second filter filtering light in a wavelength band other than the detection light; and first and second blocking masks disposed at respective preset positions and configured to block a portion of light incident thereon.

Anmelder

Firma

GQT Korea Inc.

Land

🇰🇷 Südkorea

Fachgebiete